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Silicon Carbide 2002 - Materials, Processing and Devices: Volume 742

Language EnglishEnglish
Book Hardback
Book Silicon Carbide 2002 - Materials, Processing and Devices: Volume 742 Stephen E. SaddowDavid J. LarkinNelson S. SaksAdolf Schoener
Libristo code: 02060341
Publishers Materials Research Society, March 2003
Advances in silicon carbide materials, processing and device design have recently resulted in implem... Full description
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Advances in silicon carbide materials, processing and device design have recently resulted in implementation of SiC-based electronic systems and offer great promise in high-voltage, high-temperature and high-frequency applications. This volume focuses on new developments in basic science of SiC materials as well as rapidly maturing device technologies. The challenges in this field include understanding and decreasing defect densities in bulk SiC crystals, controlling morphology and residual impurities in epilayers, optimization of implant activation and oxide-SiC interfaces, and developing novel device structures. This book brings together the crystal growers, physicists and device experts needed to continue the rapid pace of silicon-carbide-based technology. Topics include: epitaxial growth; characterization/defects; MOS technology; SiC processing and devices.

About the book

Full name Silicon Carbide 2002 - Materials, Processing and Devices: Volume 742
Language English
Binding Book - Hardback
Date of issue 2003
Number of pages 404
EAN 9781558996793
ISBN 1558996796
Libristo code 02060341
Weight 659
Dimensions 157 x 236 x 25
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