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Ion Impantation Technology

Language EnglishEnglish
Book Hardback
Book Ion Impantation Technology Karen J. Kirkby
Libristo code: 01390999
Publishers Springer, Berlin, November 2005
This is the premier world conference for the presentation of the latest advances in ion implantation... Full description
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This is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter.

About the book

Full name Ion Impantation Technology
Author Karen J. Kirkby, Russell Gwilliam, Andy Smith, David Chivers
Language English
Binding Book - Hardback
Date of issue 2006
Number of pages 664
EAN 9780735403659
Libristo code 01390999
Publishers Springer, Berlin
Weight 1897
Dimensions 210 x 277 x 41

Categories

Mathematics & Science > Physics > Nuclear physics
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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