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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

Language EnglishEnglish
Book Paperback
Book Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets MAR PAMPILL N ARCE
Libristo code: 20934534
Publishers Springer International Publishing AG, May 2018
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very h...
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This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.

About the book

Full name Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
Author MAR PAMPILL N ARCE
Language English
Binding Book - Paperback
Date of issue 2018
Number of pages 164
EAN 9783319882840
ISBN 3319882848
Libristo code 20934534
Publishers Springer International Publishing AG
Weight 2934
Dimensions 155 x 235 x 11

Categories

Mathematics & Science > Physics > Materials / States of matter > Condensed matter physics (liquid state & solid state physics)
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronics: circuits & components
Technology, Engineering, Agriculture > Technology: general issues > Nanotechnology
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