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Proceedings of the 16th International Workshop on Electron Cyclotron Resonance (ECR) Ion Sources cover topics related to the physics, design and operation of ECR ion sources, including: status reports and new developments of ECR ion sources; radioactive ion beam production and charge breeders; next generation sources; highintensity metal ion beam production; plasma physics and plasma diagnostics; ion beam extraction and ion beam transport; and applications of ECR ion sources.