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Doping Engineering for Front-End Processing: Volume 1070

Language EnglishEnglish
Book Hardback
Book Doping Engineering for Front-End Processing: Volume 1070 B. J. PawlakM. L. PelazM. LawK. Surugo
Libristo code: 02060462
Publishers Materials Research Society, October 2008
Materials scientists, silicon technologists and TCAD researchers come together in this book to share... Full description
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Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

About the book

Full name Doping Engineering for Front-End Processing: Volume 1070
Author B. J. PawlakM. L. PelazM. LawK. Surugo
Language English
Binding Book - Hardback
Date of issue 2008
Number of pages 319
EAN 9781605110400
ISBN 160511040X
Libristo code 02060462
Publishers Materials Research Society
Weight 568
Dimensions 157 x 235 x 23

Categories

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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