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Dielectric Films for Advanced Microelectronics

Language EnglishEnglish
Book Hardback
Book Dielectric Films for Advanced Microelectronics Mikhail Baklanov
Libristo code: 04878363
Publishers John Wiley & Sons Inc, February 2007
The topic of thin films is an area of increasing importance in materials science, electrical enginee... Full description
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The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

About the book

Full name Dielectric Films for Advanced Microelectronics
Language English
Binding Book - Hardback
Date of issue 2007
Number of pages 508
EAN 9780470013601
ISBN 0470013605
Libristo code 04878363
Weight 1008
Dimensions 181 x 177 x 32
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