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An Introduction to Microelectromechanical Systems Engineering

Language EnglishEnglish
Book Hardback
Book An Introduction to Microelectromechanical Systems Engineering Nadim Maluf
Libristo code: 11571490
Publishers ARTECH HOUSE INC, October 1999
Here's the first non-technical introduction to the exciting field of microelectromechanical systems... Full description
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Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications.

About the book

Full name An Introduction to Microelectromechanical Systems Engineering
Author Nadim Maluf
Language English
Binding Book - Hardback
Date of issue 1999
Number of pages 292
EAN 9780890065815
ISBN 0890065810
Libristo code 11571490
Publishers ARTECH HOUSE INC
Weight 644
Dimensions 161 x 236 x 24

Categories

Technology, Engineering, Agriculture > Mechanical engineering & materials > Mechanical engineering
Technology, Engineering, Agriculture > Energy technology & engineering > Electrical engineering
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering
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